The HΓ-VNA, an Interferometric Approach for the Accurate Measurement of Extreme Impedances

Conference paper (2019)

Authors

R. Romano Vertigo Technologies
F.A. Mubarak Van Swinden Laboratorium (VSL)
M. Spirito Electronics - EEMCS
L. Galatro Vertigo Technologies, Electronics - EEMCS
Research Group
Electronics (EEMCS) (TU Delft)
Interferometer Vector network analyzer Extreme impedance High gamma IQ mixer
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Published Date

01-06-2019

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

In this contribution, we present the performances of an IQ mixer-based RF-interferometer module, called the HΓ-VNA, designed to be used as an add-on to VNAs to improve the measurement sensitivity and accuracy of DUTs presenting extreme impedances (|Γ|>0.8). The calibration procedure used to obtain accuracy improvement is presented, and allows to set both reference and system impedance to any selected one. The procedure is benchmarked by comparing it to a conventional 50 Ω short-open-load calibration performed on a 50-Ohm VNA. For this purpose, a custom on-wafer calibration kit has been realized, using a fused silica substrate, featuring calibration loads with very high impedances (between 3.5 kΩ and 7 kΩ). Experimental results show accuracy improvements when applying the proposed calibration technique to the measurement of high impedance resistors, for frequencies below 4 GHz.

Files

08739232.pdf
(.pdf | 0.934 Mb)