Enhanced lithographic resolution using longitudinal polarization state of light

Van, M.P.; Ushakova, K.; Bastiaansen, CWM; Pereira, S.F.; Urbach, Hendrik Paul; Broer, DJ

Enhanced lithographic resolution using longitudinal polarization state of light

Journal article (2015)

Authors

M.P. Van ImPhys/Optics

K. Ushakova ImPhys/Optics

CWM Bastiaansen External organisation

S.F. Pereira ImPhys/Optics

Hendrik Paul Urbach ImPhys/Optics

DJ Broer External organisation

Research Group

ImPhys/Optics

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Published Date

2015

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Research Group

ImPhys/Optics

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