Enhanced lithographic resolution using longitudinal polarization state of light

Journal article (2015)

Authors

M.P. Van ImPhys/Optics - AS
K. Ushakova ImPhys/Optics - AS
CWM Bastiaansen External organisation
S.F. Pereira ImPhys/Optics - AS
Paul Urbach ImPhys/Optics - AS
DJ Broer External organisation
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2015

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics