Enhanced lithographic resolution using longitudinal polarization state of light
Journal Article
(2015)
Author(s)
M.P. Van (TU Delft - ImPhys/Optics)
K. Ushakova (TU Delft - ImPhys/Optics)
CWM Bastiaansen (External organisation)
SF Pereira (TU Delft - ImPhys/Optics)
Paul Urbach (TU Delft - ImPhys/Optics)
DJ Broer (External organisation)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1117/1.JMM.14.4.043509
To reference this document use:
https://resolver.tudelft.nl/uuid:83847aec-05b9-4c49-894c-0eb284e7e824
More Info
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Publication Year
2015
Research Group
ImPhys/Optics
Issue number
4
Volume number
14
Pages (from-to)
1-9
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