Fully integrated MEMS TGA device for inspection of nano-masses
Doctoral Thesis
(2012)
Author(s)
E Iervolino (TU Delft - Old - EWI Sect. ECTM)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:86d5d78c-e9c8-4f5e-995f-53ef7a67208e
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Publication Year
2012
Language
English
Research Group
Old - EWI Sect. ECTM
ISBN (print)
9789462030312
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