Pillar structures with a sub-micron space fabricated by macroporous-based micromachining
Journal Article
(2002)
Author(s)
H Ohji (TU Delft - Electronic Instrumentation)
S Izuo (External organisation)
P.J. French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:8700b52f-ca50-4ff1-9a2f-67b93ea00e8e
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Publication Year
2002
Research Group
Electronic Instrumentation
Volume number
A 97-98
Pages (from-to)
744-748
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