Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

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Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

Journal Article (2015)

Author(s)

Markus Thier (Technische Universität Wien)

Rudolf Saathof (Technische Universität Wien, TU Delft - Mechanical Engineering)

Ernst Csencsics (Technische Universität Wien)

Reinhard Hainisch (Technische Universität Wien)

Andreas Sinn (Technische Universität Wien)

Georg Schitter (Technische Universität Wien, TU Delft - Mechanical Engineering)

Research Group

Space Systems Egineering

Instrumentation Precision positioning In-process measurement Precision measurement

DOI related publication

https://doi.org/10.1515/auto-2015-0044 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:87042397-f968-482b-966e-d6bafbdf57da

More Info

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Publication Year

2015

Language

German

Research Group

Space Systems Egineering

Issue number

9

Volume number

63

Pages (from-to)

727-738

Downloads counter

157

Abstract

Mechanical vibrations occuring in a production environment cause a relative motion between the sample and inspection tool that distorts measurements at the nanometer level. To overcome this problem, this paper proposes a metrology platform that maintains a constant relative distance to the sample by means of an H& inf;-feedback controller. Experiments in one degree of freedom show that the metrology platform can reduce vibrations as they occur in a production environment by one order of magnitude. Therefore, it enables in-line surface metrology at the nanometer level.