Thermo-electric characterization of APCVD PolySi/sub 0.7/Ge/sub 0.3/ for IC-compatible fabrication of integrated lateral Peltier elements

Journal article (2005)

Authors

DDL Wijngaards Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation