Evaluation of multigrid as a solver for stress analysis problems in semiconductor process simulation
Book Chapter
(2000)
Author(s)
S Mijalkovic (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Publication Year
2000
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
179-185
Publisher
Springer
ISBN (print)
3-540-67157-9
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42
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