Spray coating of photoresist for pattern transfer on high topography surfaces
Journal Article
(2005)
Author(s)
NP Pham (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/doi:10.1088/0960-1317/15/4/003
To reference this document use:
https://resolver.tudelft.nl/uuid:8b485aa4-a3c4-4204-8390-24138be8a30f
More Info
expand_more
expand_more
Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Issue number
4
Volume number
15
Pages (from-to)
691-697
No files available
Metadata only record. There are no files for this record.