Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers
Journal Article
(2008)
Authors
G.C.A.M. Janssen (OLD Surface and Interface Engineering)
M.M. Abdalla (OLD Aerospace Structures)
F. van Van Keulen (TU Delft - Computational Design and Mechanics)
BR Pujada Bermudez (OLD Surface and Interface Engineering)
B van Venrooy (External organisation)
Research Group
OLD Surface and Interface Engineering
To reference this document use:
https://doi.org/doi:10.1016/j.tsf.2008.07.14
TU Delft Repository resolver:
https://resolver.tudelft.nl/8bc035ed-5c94-4aa2-9419-cde9066caf82
More Info
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Publication Year
2008
Research Group
OLD Surface and Interface Engineering
Volume number
517
Pages (from-to)
1858-1867
DOI:
https://doi.org/doi:10.1016/j.tsf.2008.07.14
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