Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

Conference Paper (1999)
Author(s)

JPAM Driessen (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))

AD Kuypers (External organisation)

J. Schoonman (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))

Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
More Info
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Publication Year
1999
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Pages (from-to)
605-612

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