Identification of an overactuated deformable mirror system with unmeasured outputs
Paul Tacx (Eindhoven University of Technology)
Roel Habraken (Eindhoven University of Technology, TNO)
Gert Witvoet (TNO, Eindhoven University of Technology)
Marcel Heertjes (ASML, Eindhoven University of Technology)
Tom Oomen (TU Delft - Team Jan-Willem van Wingerden, Eindhoven University of Technology)
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Abstract
Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and next-generation control. The aim of this paper is to develop a unified approach for the identification of mechanical systems with a large number of spatially distributed actuators and a limited number of sensors. A frequency domain-based approach using local modeling techniques is developed. The modal modeling framework is employed to analyze the design and create outputs that were not measured. The proposed approach is applied to an experimental deformable mirror case study that illustrates the effectiveness of the proposed approach.
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