Growth mechanisms during homoepitaxial growth of silicon

Doctoral Thesis (1999)
Author(s)

J van Wingerden (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)

Department
Old organisation TN/TechnischeNatuurkunde voorm
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Publication Year
1999
Department
Old organisation TN/TechnischeNatuurkunde voorm

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