2D Electro-Thermal Microgrippers with Large Clamping and Rotation Motion at Low Driving Voltage

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2D Electro-Thermal Microgrippers with Large Clamping and Rotation Motion at Low Driving Voltage

Conference Paper (2007)

Author(s)

T Chu Duc (TU Delft - Electronic Components, Technology and Materials)

GK Lau (TU Delft - Computational Design and Mechanics)

J. Wei (TU Delft - Electronic Components, Technology and Materials)

P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek Conf.proc. > 3 pag Conference contrib. refereed

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https://resolver.tudelft.nl/uuid:900cf8c7-b583-4aed-8350-84b433e473fc

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Publication Year

2007

Research Group

Electronic Components, Technology and Materials

Pages (from-to)

687-690

ISBN (print)

1-4244-0951-9

Abstract

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 µm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160 degrees Centigrade.

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