Galvanic etch stop in KOH with reduced au area using NaOCI
Conference Paper
(2002)
Author(s)
E Connolly (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
XH Xia (External organisation)
JJ Kelly (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:906b8e81-e34b-4646-a881-bbfa10634aae
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Publication Year
2002
Research Group
Electronic Instrumentation
Pages (from-to)
443-446
ISBN (print)
80-01-02576-4
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