Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides
Journal Article
(2012)
Author(s)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
E Margallo-Balbás (External organisation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1117/1.JNP.6.063530
To reference this document use:
https://resolver.tudelft.nl/uuid:91dc2bcd-4456-4684-bf16-0432a885577b
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
1
Volume number
6
Pages (from-to)
1-7
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