An electro-thermal silicon-polymer micro-gripper for simultaneous in-plane and out-of-plane motions
Conference Paper
(2008)
Author(s)
J. Wei (TU Delft - Electronic Components, Technology and Materials)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:93127009-ef50-4524-81a0-bc0c8c038a56
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1466-1469
ISBN (print)
978-3-00-025217-4
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