Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

Conference paper (2004)

Authors

DHB Wicaksono Electronic Instrumentation - EEMCS
G. Pandraud Electronic Instrumentation - EEMCS
JFV Vincent External organisation
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation