Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects
Conference Paper
(2004)
Author(s)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
G Pandraud (TU Delft - Electronic Instrumentation)
JFV Vincent (External organisation)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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Publication Year
2004
Research Group
Electronic Instrumentation
Pages (from-to)
787-792
ISBN (print)
90-73461-43-X
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