Merging standard CVD techniques for Ga-As and Si eptaxial growth
Journal Article
(2010)
Author(s)
A. Sammak (TU Delft - Electronic Components, Technology and Materials)
Wiebe De Boer (TU Delft - Electronic Components, Technology and Materials)
A van den Boogaard (External organisation)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:94268f66-430a-41cc-a3f8-82009ffffd2a
More Info
expand_more
expand_more
Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
5
Volume number
28
Pages (from-to)
237-244
No files available
Metadata only record. There are no files for this record.