A comparison between light reflectometry and ellipsometry in the Rayleigh regime.

Journal Article (2000)
Author(s)

RC van Duijvenbode (External organisation)

GJM Koper (TU Delft - Old - sect Physical Chemistry (DCT/LFC))

Research Group
Old - sect Physical Chemistry (DCT/LFC)
More Info
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Publication Year
2000
Research Group
Old - sect Physical Chemistry (DCT/LFC)
Issue number
104
Volume number
2000
Pages (from-to)
9878-9886

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