Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor

Journal article (2012)

Authors

A. Purniawan Electronic Instrumentation - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces
A Marthen External organisation
KA Vakalopoulos External organisation
P.J. French Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation