Fabrication and optical measurements of a TiO2 ALD evanescent waveguide sensor
Journal Article
(2012)
Author(s)
A. Purniawan (TU Delft - Electronic Instrumentation)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
T Moh (TU Delft - OLD ChemE/Organic Materials and Interfaces)
A Marthen (External organisation)
KA Vakalopoulos (External organisation)
Patrick J. French (TU Delft - Electronic Instrumentation)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1016/j.sna.2012.05.037
To reference this document use:
https://resolver.tudelft.nl/uuid:9683678b-f6be-435e-9ec9-0e6b310775df
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Publication Year
2012
Language
English
Research Group
Electronic Instrumentation
Volume number
188
Pages (from-to)
127-132
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