Reliability accelerated testing of MEMS acccelerometers

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Reliability accelerated testing of MEMS acccelerometers

Conference Paper (2007)

Author(s)

Marius Bâzu (National Institute for Research and Development in Biological Sciences)

Lucian Gǎlǎţeanu (National Institute for Research and Development in Biological Sciences)

Virgil Emil Ilian (National Institute for Research and Development in Biological Sciences)

Jerome Loicq (Sart Tilman B52)

Serge Habraken (Sart Tilman B52)

Jean Paul Colette (Sart Tilman B52)

Affiliation

External organisation

MEMS Vibration Reliability Accelerometers Tilting

DOI related publication

https://doi.org/10.1109/SMICND.2007.4519657 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:96f9fae2-4adc-4b36-a95f-68bcbf058d6b

More Info

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Publication Year

2007

Language

English

Affiliation

External organisation

Article number

4519657

Pages (from-to)

103-106

ISBN (print)

['9781424408474', '1424408474']

Event

2007 International Semiconductor Conference, CAS 2007 (2007-10-15 - 2007-10-17), Sinaia, Romania

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Abstract

An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10^-8h^-1.