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Reliability accelerated testing of MEMS acccelerometers

Conference Paper (2007)
Author(s)

Marius Bâzu (National Institute for Research and Development in Biological Sciences)

Lucian Gǎlǎţeanu (National Institute for Research and Development in Biological Sciences)

Virgil Emil Ilian (National Institute for Research and Development in Biological Sciences)

Jérome Loicq (Sart Tilman B52)

Serge Habraken (Sart Tilman B52)

Jean Paul Collette (Sart Tilman B52)

Affiliation
External organisation
DOI related publication
https://doi.org/10.1109/SMICND.2007.4519657
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Publication Year
2007
Language
English
Affiliation
External organisation
Pages (from-to)
103-106
ISBN (print)
['9781424408474', '1424408474']

Abstract

An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1.

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