Beneficial influence of continuous ion bombardment during reactive sputter deposition of chromium nitride films

Janssen, G.C.A.M.; Hoy, RB

Beneficial influence of continuous ion bombardment during reactive sputter deposition of chromium nitride films

Journal article (2003)

Authors

G.C.A.M. Janssen OLD Virtual Materials and Mechanics

RB Hoy OLD Virtual Materials and Mechanics

Research Group

OLD Virtual Materials and Mechanics

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Published Date

2003

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Research Group

OLD Virtual Materials and Mechanics

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