Beneficial influence of continuous ion bombardment during reactive sputter deposition of chromium nitride films
Journal Article
(2003)
Author(s)
Guido Janssen (TU Delft - OLD Virtual Materials and Mechanics)
RB Hoy (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Virtual Materials and Mechanics
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https://resolver.tudelft.nl/uuid:96fe1549-c9b9-4354-beef-77d80e7d8c60
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Publication Year
2003
Research Group
OLD Virtual Materials and Mechanics
Issue number
3
Volume number
21
Pages (from-to)
569-571
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