Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics

E Serra (TU Delft - Electronic Components, Technology and Materials)

M Bonaldi (External organisation)

Antonio Borrielli (External organisation)

F. Marin (External organisation)

L. Marconi (External organisation)

F. Marino (External organisation)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

A. Pontin (External organisation)

G.A. Prodi (External organisation)

Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)