Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics

Journal article (2015)

Authors

E. Serra Electronic Components, Technology and Materials - EEMCS
M Bonaldi External organisation
A Borrielli External organisation
F Marin External organisation
L Marconi External organisation
F Marino External organisation
G. Pandraud Electronic Components, Technology and Materials - EEMCS
A Pontin External organisation
GA Prodi External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials