Stress and strain in titanium nitride thin films
Journal Article
(2009)
Author(s)
R Machunze (TU Delft - OLD Surface and Interface Engineering)
Guido Janssen (TU Delft - OLD Surface and Interface Engineering)
Research Group
OLD Surface and Interface Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:9802352b-49ca-45e7-beae-88a150135f0d
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Publication Year
2009
Research Group
OLD Surface and Interface Engineering
Volume number
517
Pages (from-to)
5888-5893
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