Stress and strain in titanium nitride thin films

Machunze, R; Janssen, G.C.A.M.

Stress and strain in titanium nitride thin films

Journal article (2009)

Authors

R Machunze OLD Surface and Interface Engineering

G.C.A.M. Janssen OLD Surface and Interface Engineering

Research Group

OLD Surface and Interface Engineering

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Published Date

2009

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Research Group

OLD Surface and Interface Engineering

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