Stress and strain in titanium nitride thin films

Journal Article (2009)
Author(s)

R Machunze (TU Delft - OLD Surface and Interface Engineering)

Guido Janssen (TU Delft - OLD Surface and Interface Engineering)

Research Group
OLD Surface and Interface Engineering
More Info
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Publication Year
2009
Research Group
OLD Surface and Interface Engineering
Volume number
517
Pages (from-to)
5888-5893

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