Experimental and theoretical investigation on the misalignment tolerance of micron-sized solid immersion lens

Journal Article (2013)
Author(s)

A da Costa Assafrao (TU Delft - ImPhys/Optics)

MS Kim (External organisation)

A.J.H. Wachters (TU Delft - ImPhys/Optics)

T Scharf (External organisation)

HP Herzig (External organisation)

S Olivier (External organisation)

M Brun (External organisation)

SF Pereira (TU Delft - ImPhys/Optics)

Paul Urbach (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1088/2040-8978/15/2/025706
More Info
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Issue number
2
Volume number
15
Pages (from-to)
1-6

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