Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope

Journal article (2009)

Authors

L. Kouwen External organisation
APJM Botman ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
expand_more

Published Date

2009

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics