Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope
Journal Article
(2009)
Author(s)
L. Kouwen (External organisation)
APJM Botman (TU Delft - ImPhys/Charged Particle Optics)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:9aba0276-ba85-4da9-9f00-061adc97a1e8
More Info
expand_more
expand_more
Publication Year
2009
Research Group
ImPhys/Charged Particle Optics
Volume number
9
Pages (from-to)
2149-2152
No files available
Metadata only record. There are no files for this record.