Low-pressure chemical vapor deposition of pureB layers on silicon for p+n junction formation

Conference Paper (2012)
Author(s)

KRC Mok (External organisation)

V Mohammadi (TU Delft - Electronic Components, Technology and Materials)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

WB De Boer (TU Delft - Old - EWI Sect. ECTM)

AHG Vlooswijk (External organisation)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/IWJT.2012.6212822
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
113-116

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