Low-pressure chemical vapor deposition of pureB layers on silicon for p+n junction formation
Conference Paper
(2012)
Author(s)
KRC Mok (External organisation)
V Mohammadi (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
WB De Boer (TU Delft - Old - EWI Sect. ECTM)
AHG Vlooswijk (External organisation)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/IWJT.2012.6212822
To reference this document use:
https://resolver.tudelft.nl/uuid:9b24f125-b055-4aa6-be49-56c06875c65c
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
113-116
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