Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining
Conference Paper
(2001)
Author(s)
H Ohji (External organisation)
S Izuo (External organisation)
PJ French (TU Delft - Electronic Instrumentation)
K Tsutsumi (External organisation)
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Publication Year
2001
Pages (from-to)
1-4
Publisher
Springer
ISBN (print)
3-540-42150-5
Event
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