Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Journal Article
(2003)
Author(s)
DW de Lima Monteiro (TU Delft - Electronic Instrumentation)
O Akhzar-Mehr (External organisation)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
G.V. Vdovine (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:a0ca7cc6-bbb2-42e2-8ee0-587d2c61e8e0
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Publication Year
2003
Research Group
Electronic Instrumentation
Issue number
18
Volume number
11
Pages (from-to)
2244-2252
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