Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Journal article (2003)

Authors

de Lima Monteiro de Lima Monteiro Electronic Instrumentation - EEMCS
Akhzar-Mehr Akhzar-Mehr External organisation
Sarro Sarro Electronic Components, Technology and Materials - EEMCS
Vdovin Vdovin Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Elektrotechniek Techniek
More Info
expand_more

Published Date

2003

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation