Coupling plate deformation, electrostatic acruation and sqeeze folm damping in a fem model of a micro switch
Conference Paper
(2009)
Author(s)
SDA Hannot (TU Delft - Dynamics of Micro and Nano Systems)
D.J. Rixen (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:a1981fd9-cd47-4ec1-a592-7e7bd353d697
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Publication Year
2009
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
1-4
ISBN (print)
978-84-96736-65-8
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