Piezoelectric property characterization of GaN AlN stacks by SAW devices

Master Thesis (2024)
Author(s)

Y. Liu (TU Delft - Mechanical Engineering)

Contributor(s)

T. Manzaneque Garcia – Mentor (TU Delft - Electronic Instrumentation)

K.M. Dowling – Mentor (TU Delft - Electronic Instrumentation)

Richard Norte – Mentor (TU Delft - Dynamics of Micro and Nano Systems)

Sabina Caneva – Graduation committee member (TU Delft - Dynamics of Micro and Nano Systems)

Faculty
Mechanical Engineering
More Info
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Publication Year
2024
Language
English
Graduation Date
22-10-2024
Awarding Institution
Delft University of Technology
Programme
Mechanical Engineering | Precision and Microsystems Engineering
Faculty
Mechanical Engineering
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