Method and apparatus for in-situ sample quality inspection in cryogenic focused ion beam milling

Patent (2024)

Contributors

R. Skoupý BN/Arjen Jakobi Lab - AS (inventor)
A. Jakobi BN/Arjen Jakobi Lab - AS (inventor)
D.B. Boltje BN/Arjen Jakobi Lab - AS , ImPhys/Hoogenboom group - AS (inventor)
J.P. Hoogenboom ImPhys/Hoogenboom group - AS (inventor)
Research Group
BN/Arjen Jakobi Lab (AS) (TU Delft)
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Published Date

2024

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

BN/Bionanoscience

Research Group

BN/Arjen Jakobi Lab