Cleanroom in an SEM
G. Jeevanandam (TU Delft - ImPhys/Hagen group)
Cornelis W. Hagen – Promotor (TU Delft - ImPhys/Hagen group)
Pieter Kruit – Promotor (TU Delft - ImPhys/Hoogenboom group)
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Abstract
The work described in the doctoral thesis aims to enhance the functionality of a scanning electron microscope (SEM) by integrating miniaturized versions of cleanroom tools used in microfabrication. The thesis presents the integration of substrate heating, in-situ thermal atomic layer deposition (ALD), sputtering, and thermal evaporation within the SEM. These techniques are expected to enable fast and efficient fabrication of proof-of-concept devices with minimal resources. The thesis also discusses the challenges, limitations, and future work of the integrated cleanroom processes in SEM.
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