Microstructure of SiGe/Si multilayers and a-SiGe layers: P2141, P2192, P2537 and P1700

Report (2002)

Authors

F.D. Tichelaar OLD Virtual Materials and Mechanics
T.R. de Kruijff OLD Virtual Materials and Mechanics
Research Group
OLD Virtual Materials and Mechanics
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Published Date

2002

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Research Group

OLD Virtual Materials and Mechanics