Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines

Journal article (1998)

Authors

EH Mulder ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

1998

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics