Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines
Journal Article
(1998)
Author(s)
EH Mulder (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:a81c291c-52fc-4e31-9f0b-8833f79aad88
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Publication Year
1998
Research Group
ImPhys/Charged Particle Optics
Volume number
41/42
Pages (from-to)
159-162
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