Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope
Journal Article
(2011)
Author(s)
P.C. Post (External organisation)
A Mohammadi-Gheidari (External organisation)
CW Hagen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:aa96844c-937b-4b3a-98d4-0947375fd098
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Publication Year
2011
Research Group
ImPhys/Charged Particle Optics
Volume number
29
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