High speed atomic force microscopy for wafer inspection
Abstract
(2014)
Author(s)
Sasan Keyvani Janbahan (TU Delft - Computational Design and Mechanics)
Hamed Sadeghian Marnani (TU Delft - Computational Design and Mechanics)
Selman Tamer (TU Delft - Computational Design and Mechanics)
J. F.L. Goosen (TU Delft - Computational Design and Mechanics)
F. van Keulen (TU Delft - Computational Design and Mechanics)
Research Group
Computational Design and Mechanics
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https://resolver.tudelft.nl/uuid:aabec9ca-9423-4f35-a8d0-542888817e1a
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Publication Year
2014
Language
English
Research Group
Computational Design and Mechanics
Pages (from-to)
1-2
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