High speed atomic force microscopy for wafer inspection

Keyvani Janbahan, A.; Sadeghian Marnani, Hamed; Tamer, M.S.; Goosen, J.F.L.; Van Keulen, A.

High speed atomic force microscopy for wafer inspection

Abstract (2014)

Authors

A. Keyvani Janbahan Computational Design and Mechanics

Hamed Sadeghian Marnani Computational Design and Mechanics

M.S. Tamer Computational Design and Mechanics

J.F.L. Goosen Computational Design and Mechanics

A. Van Keulen Computational Design and Mechanics

Research Group

Computational Design and Mechanics

To reference this document use:

http://resolver.tudelft.nl/uuid:aabec9ca-9423-4f35-a8d0-542888817e1a

More Info

expand_more

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Computational Design and Mechanics

No files available

Metadata only record. There are no files for this abstract.