Structured identification of multivariable modal systems
M. van der Hulst (Eindhoven University of Technology)
R. A. González (Eindhoven University of Technology)
K. Classens (Eindhoven University of Technology)
P. Tacx (Eindhoven University of Technology)
N. Dirkx (ASML)
J. van de Wijdeven (ASML)
T. Oomen (Eindhoven University of Technology, TU Delft - Team Jan-Willem van Wingerden)
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Abstract
Physically interpretable models are essential for next-generation industrial systems, as these representations enable effective control, support design validation, and provide a foundation for monitoring strategies. The aim of this paper is to develop a system identification framework for estimating modal models of complex multivariable mechanical systems from frequency response data. To achieve this, a two-step structured identification algorithm is presented, where an additive model is first estimated using a refined instrumental variable method and subsequently projected onto a modal form. The developed identification method provides accurate, physically-relevant, minimal-order models, for both generally-damped and proportionally damped modal systems. The effectiveness of the proposed method is demonstrated through experimental validation on a prototype wafer-stage system, which features a large number of spatially distributed actuators and sensors and exhibits complex flexible dynamics.
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