Low-temperature chemical vapour deposition of titanium nitride
Doctoral Thesis
(1999)
Author(s)
JPAM Driessen (TU Delft - Old - sect Laboratory Inorganic Chemistry (DCT/AC))
Contributor(s)
J Schoonman – Promotor
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Publication Year
1999
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
ISBN (print)
90-9013159-0
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