Thermal property of LPCVD SiN membrane for far infrared sensor application
Conference Paper
(2008)
Author(s)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
F jutzi (External organisation)
G Pandraud (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:ae48efa1-aa7b-41da-add5-5167240fc4f2
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
168-173
ISBN (print)
0855-8692
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