Thermal property of LPCVD SiN membrane for far infrared sensor application

Wicaksono, DHB; jutzi, F; Pandraud, G; French, Paddy

Thermal property of LPCVD SiN membrane for far infrared sensor application

Conference paper (2008)

Authors

DHB Wicaksono Electronic Instrumentation

F jutzi External organisation

G Pandraud Electronic Instrumentation

Paddy French Electronic Instrumentation

Research Group

Electronic Instrumentation

Elektrotechniek Techniek Conference contrib. non-refer.

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Published Date

2008

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Research Group

Electronic Instrumentation

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