High-speed computational imaging with path-corrected fly-scan ptychography
Augustas Karpavičius (Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography, Amsterdam, TU Delft - Applied Sciences)
Matthias Gouder (Advanced Research Center for Nanolithography, Amsterdam, Vrije Universiteit Amsterdam)
Stefan Witte (TU Delft - Applied Sciences, Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography, Amsterdam)
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Abstract
Ptychography is a powerful computational imaging technique that reconstructs both the complex object function and the illumination probe from overlapping diffraction patterns. While it provides high-resolution, aberration-corrected imaging, its reliance on stepwise mechanical scanning limits acquisition speed. In this work, we propose a fly-scan ptychographic approach that enables continuous sample translation along arbitrary trajectories, significantly reducing measurement time. To account for motion-induced decoherence, we incorporate an object mode decomposition model combined with automatic differentiation for accurate trajectory correction. This method enables diffraction-limited reconstructions without the need for high-speed tracking, allowing fast and precise measurements using standard ptychographic setups.
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