Physics-Guided Neural Networks for Feedforward Control
An Orthogonal Projection-Based Approach
Johan Kon (Eindhoven University of Technology)
Dennis Bruijnen (Philips Research)
Jeroen van de Wijdeven (ASML)
Marcel Heertjes (ASML, Eindhoven University of Technology)
T. Oomen (TU Delft - Team Jan-Willem van Wingerden, Eindhoven University of Technology)
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Abstract
Unknown nonlinear dynamics can limit the performance of model-based feedforward control. The aim of this paper is to develop a feedforward control framework for systems with unknown, typically nonlinear, dynamics. To address the unknown dynamics, a physics-based feedforward model is complemented by a neural network. The neural network output in the subspace of the model is penalized through orthogonal projection. This results in uniquely identifiable model coefficients, enabling increased performance and similar task flexibility with respect to the model-based controller. The feedforward framework is validated on a representative system with performance limiting nonlinear friction characteristics.