Nano-fluidic flow in the nano-aperture ion source

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Nano-fluidic flow in the nano-aperture ion source

Journal Article (2019)

Author(s)

Leon van Kouwen (TU Delft - ImPhys/Charged Particle Optics)

Research Group

ImPhys/Charged Particle Optics

Knudsen minimum Nano-aperture ion source Knudsen paradox Micro-channels Micro-fluidics Molecular flow Nano-fluidic flow Transition flow

DOI related publication

https://doi.org/10.1016/bs.aiep.2019.09.002 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:b0b16f80-d88c-4d68-b542-54473dbe62b6

More Info

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Publication Year

2019

Language

English

Research Group

ImPhys/Charged Particle Optics

Volume number

212

Pages (from-to)

217-235

Downloads counter

95

Abstract

An essential aspect of the nano-aperture ion source is the delivery of gas towards the double aperture structure. This requires a nano-fluidic channel. In order to estimate the fluidic properties and understand the underlying transport mechanisms of such a channel, a flow model was developed. The model shows good agreement with three different sets of experimental data. The model is used to show that naive channel design will perform poorly. Nevertheless, carefully designed channels that perform well are achievable.