Fault Detection for Precision Mechatronics
Online Estimation of Mechanical Resonances
Koen Classens (Eindhoven University of Technology)
Mike Mostard (Eindhoven University of Technology)
Jeroen Van De Wijdeven (ASML)
W. P.M.H. Maurice Heemels (Eindhoven University of Technology)
Tom Oomen (Eindhoven University of Technology, TU Delft - Team Jan-Willem van Wingerden)
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Abstract
The condition of mechatronic production equipment slowly deteriorates over time, increasing the risk of failure and associated unscheduled downtime. A key indicator for an increased risk for failures is the shifting of resonances. The aim of this paper is to track the shifting resonances of the equipment online and during normal operation. This paper contributes to real-time parametric fault diagnosis by applying and comparing parameter estimators in this new context, highly relevant for next-generation mechatronic systems. The proposed fault diagnosis systems consist of recursive least squares algorithms and the effectiveness is illustrated on an overactuated and oversensed flexible beam setup, allowing to artificially manipulate its effective resonances in a controlled manner.
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