A compact low-stiffness six degrees of freedom compliant precision stage

Journal Article (2013)
Author(s)

A.G. Dunning (TU Delft - Mechatronic Systems Design)

N Tolou (TU Delft - Mechatronic Systems Design)

Just L. Herder (TU Delft - Mechatronic Systems Design)

Research Group
Mechatronic Systems Design
DOI related publication
https://doi.org/10.1016/j.precisioneng.2012.10.007
More Info
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Publication Year
2013
Language
English
Research Group
Mechatronic Systems Design
Issue number
2
Volume number
37
Pages (from-to)
380-388

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