A new horizon
Using heat to measure distance in high performance metrology solutions
Abstract
(2016)
Author(s)
Roy Bijster (TU Delft - Mechanical Engineering)
Hamed Sadeghian Marnani (TNO)
Fred van Keulen (TU Delft - Mechanical Engineering)
Research Group
Computational Design and Mechanics
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Publication Year
2016
Language
English
Research Group
Computational Design and Mechanics
Event
13th International Workshop on Nanomechanical Sensing (2016-06-22 - 2016-06-24), Delft, Netherlands
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