Arbitrary optical surfaces anisotropically etched in silicon in a single-mask process

Conference paper (2003)

Authors

DW de Lima Monteiro Electronic Instrumentation - EEMCS
Gleb Vdovin Electronic Instrumentation - EEMCS
O Akhzar-Mehr External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation