Arbitrary optical surfaces anisotropically etched in silicon in a single-mask process
Conference Paper
(2003)
Author(s)
DW de Lima Monteiro (TU Delft - Electronic Instrumentation)
Gleb Vdovine (TU Delft - Electronic Instrumentation)
O Akhzar-Mehr (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:b1d1c433-e3c3-42fc-b34d-9917247ae31f
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
135-138
ISBN (print)
90-808266-1-8
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