Arbitrary optical surfaces anisotropically etched in silicon in a single-mask process

Conference Paper (2003)
Author(s)

DW de Lima Monteiro (TU Delft - Electronic Instrumentation)

Gleb Vdovine (TU Delft - Electronic Instrumentation)

O Akhzar-Mehr (External organisation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
135-138
ISBN (print)
90-808266-1-8

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