Optimization of Polymeric Electro-Thermal Micro-Actuator for Various Criteria

Conference paper (2007)

Authors

GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

This paper explores the possibility of advancing the actuation capability of a thermal actuator design, based on the polymeric SU-8 epoxy with embedded silicon (Si) microstructures. Theoretical models for the actuator design are established in an attempt to evaluate the thermoelastic and thermal time responses for the composite design. Thereafter, design criteria and design variables are identified. Optimization of the composite design results in an optimum design that improves the energy density, but does not compromise the thermal response time. The optimum design (70-30% SU-8/Si) has a 20% higher energy density than that of the initial design (50-50% SU-8/Si) and a 20% decrease in thermal response time. It is noted that the optimum energy density for the composite is 2.6 times higher than pure SU-8.

Keywords: MEMS actuator, thermal actuator, artificial muscle, micro-actuator, polymeric actuator.