Control of recoil losses in nanomechanical SiN membrane resonators
A. Borrielli (Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, Trento Institute for Fundamental Physics and Application)
L. Marconi (Istituto Nazionale di Fisica Nucleare - Sezione di Firenze, Istituto Nazionale di Ottica, Consiglio Nazionale delle Ricerche)
F. Marin (Istituto Nazionale di Fisica Nucleare - Sezione di Firenze, University of Florence, Istituto Nazionale di Ottica, Consiglio Nazionale delle Ricerche, European Laboratory for Non-linear Spectroscopy (LENS))
F. Marino (Istituto Nazionale di Ottica, Consiglio Nazionale delle Ricerche, Istituto Nazionale di Fisica Nucleare - Sezione di Firenze)
Bruno Morana (Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, TU Delft - EKL-Users)
Grégory Pandraud (TU Delft - EKL Processing)
A. Pontin (University of Florence, Istituto Nazionale di Fisica Nucleare - Sezione di Firenze)
G.A. Prodi (Trento Institute for Fundamental Physics and Application, Università di Trento)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
E Serra (TU Delft - Electronic Components, Technology and Materials, Trento Institute for Fundamental Physics and Application)
M. Bonaldi (Trento Institute for Fundamental Physics and Application, Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division)
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Abstract
In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of 107, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.
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