Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range
Journal Article
(1999)
Author(s)
JHG Correia (External organisation)
M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Reinoud Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Old - EWI Ch. Integrated Sensing Devices
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https://resolver.tudelft.nl/uuid:b4729261-bce0-4bb9-8adf-8a088e3e8e1d
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Publication Year
1999
Research Group
Old - EWI Ch. Integrated Sensing Devices
Issue number
1-3
Volume number
76
Pages (from-to)
191-196
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